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Electromagnetic energy harvester by using buried NdFeB

  • S. Miki*
  • , T. Fujita
  • , T. Kotoge
  • , Y. G. Jiang
  • , M. Uehara
  • , K. Kanda
  • , K. Higuchi
  • , K. Maenaka
  • *此作品的通讯作者
  • University of Hyogo
  • JST ERATO Maenaka Human-Sensing Fusion Project
  • Hitachi, Ltd.

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

This study describes the fabrication and measurement of an electromagnetic-type energy harvester by using buried NdFeB/Ta multilayer films. The energy harvester is fabricated by bonding a vibratory mass with buried micro-magnets and a stator with integrated micro-coils together. The performance of the micro-magnets was enhanced by new methods of a mechanical polishing process of buried NdFeB. The output power of the energy harvester was improved to 760 pW with an applied vibration amplitude of 48 μm p-p at 94.9 Hz.

源语言英语
主期刊名2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
1221-1224
页数4
DOI
出版状态已出版 - 2012
活动2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, 法国
期限: 29 1月 20122 2月 2012

出版系列

姓名Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

会议

会议2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
国家/地区法国
Paris
时期29/01/122/02/12

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