@inproceedings{4c2ff286d8484f44b75e29f099aaed68,
title = "Electromagnetic energy harvester by using buried NdFeB",
abstract = "This study describes the fabrication and measurement of an electromagnetic-type energy harvester by using buried NdFeB/Ta multilayer films. The energy harvester is fabricated by bonding a vibratory mass with buried micro-magnets and a stator with integrated micro-coils together. The performance of the micro-magnets was enhanced by new methods of a mechanical polishing process of buried NdFeB. The output power of the energy harvester was improved to 760 pW with an applied vibration amplitude of 48 μm p-p at 94.9 Hz.",
author = "S. Miki and T. Fujita and T. Kotoge and Jiang, \{Y. G.\} and M. Uehara and K. Kanda and K. Higuchi and K. Maenaka",
year = "2012",
doi = "10.1109/MEMSYS.2012.6170409",
language = "英语",
isbn = "9781467303248",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "1221--1224",
booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",
note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",
}