Effects of Temperature and Pressure on the Geometry of Micro Wineglass Resonators During the Fabrication Process

Micro hemispherical resonant gyroscopes (mHRGs) are characterized by high precision, high reliability, small size, low cost, and long life, thus providing a wide range of applications. The resonator is a core component in an mHRG, and its fabrication process is crucial for improving performance. A finite element model (FEM) based on three fundamental conservation laws using thermodynamic and hydrodynamic physical fields is developed, and the blowing process of a micro wineglass resonator is simulated to obtain the geometric dependence of the micro wineglass resonator on temperature and pressure. A blowing setup characterized by simple process and low-cost for resonator fabrication is established, and the experimental results reveal that the effects of temperature and pressure on the geometric parameters, including the curvature radius at the transition region, shell radius, and thickness distribution of resonators, are consistent with the simulation analysis. Using optimized temperature and pressure parameters, a low support loss and reduced internal stress resonator with optimized geometry is produced with a controllable rate and high efficiency.