Effect of TaN buffer layer on the sensitivity of ASIC-integrated AMR sensors

This study investigates the impact of a TaN buffer layer on the performance of ASIC-integrated Anisotropic Magnetoresistive (AMR) position sensors. Our findings demonstrate that the inclusion of a TaN buffer layer significantly enhances the sensitivity and stability of the sensors, with a measured sensitivity of 0.678 ± 0.03 Gauss/mV. In contrast, devices without the buffer layer exhibit a notable decline in sensitivity, decreasing to 0.165 ± 0.02 Gauss/mV after 450℃ annealing. In addition, AMR sensors fabricated on non-ASIC substrates showed no such deterioration. Magneto-optical Kerr effect (MOKE) measurements reveal that the change in sensitivity is primarily attributed to variations in the anisotropy field. We propose that the increased anisotropy field is a result of magnetostatic energy induced by alterations in the PECVD-deposited SiO2 surface granular structure, supported by surface morphology characterization and X-ray diffraction experiments. These findings highlight the critical role of the TaN buffer layer in optimizing the performance and stability of ASIC-integrated AMR sensors.