@inproceedings{ef48d4951cfe4423a72b07bb1ee27ee0,
title = "Development of monolithic PZT microstage for the application of ultra high-density data storage",
abstract = "This paper presents the fabrication and characterizations of a compact PZT actuated microstage with multi degrees of freedom (DOFs). The entire device is fabricated in a symmetrically arrangement from a monolithic PZT plate with a size of 15×15×0.8 mm 3. Displacement amplification mechanisms are integrated in the structure to increase the stroke of PZT actuators. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 μm in x- and y-axes and 10 μm in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.",
keywords = "Bimorph, Data storage, FEM, Microstage, PZT",
author = "Xu, \{H. G.\} and K. Okamoto and Zhang, \{D. Y.\} and T. Ono and M. Esashi",
year = "2005",
doi = "10.1109/SENSOR.2005.1496517",
language = "英语",
isbn = "0780389948",
series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",
pages = "717--720",
booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",
note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}