@inproceedings{4292f391da404f64a1ddfb471f9509fd,
title = "Development of an All-Polyimide Flexible Airflow Sensor for Flow-Velocity and Flow-Direction Sensing",
abstract = "In this study, we developed an all-polyimide flexible airflow sensor, which consisted of four hair-like curved polyimide (PI) cantilever beams arranged in a cross-form configuration and graphene/polyimide (Gr/PI) nanocomposite-based piezoresistors. Electrical breakdown process was applied to fabricate the Gr/PI nanocomposite-based piezoresistors. As airflow travels through the cross-form configuration hair-like curved cantilevers, the cantilever beams will be deformed, which leads to a corresponding change in the resistances of the piezoresistors. As the hair-like airflow sensor is fully flexible, it can fit on curved surfaces. To compensate the ambient temperature fluctuation on the measurement accuracy of flow velocity, a temperature sensor is integrated nearby the cantilevers. The sensor is designed to have the ability of measuring both the flow velocity and flow direction, which is very crucial to many practical applications.",
keywords = "airflow sensor, flexible sensor, flow sensing, temperature sensor",
author = "Dawei Shen and Qipei He and Zhiqiang Ma and Yonggang Jiang",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020 ; Conference date: 27-09-2020 Through 30-09-2020",
year = "2020",
month = sep,
day = "27",
doi = "10.1109/NEMS50311.2020.9265571",
language = "英语",
series = "15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "139--142",
booktitle = "15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020",
address = "美国",
}