Design principle of high-precision flexure mechanisms based on parasitic-motion compensation

In design of flexure mechanism, diminishing the parasitic-motion is a key point to improve the accuracy. However, most of existing topics concentrate on improving the accuracy of linear-motion flexure mechanisms via compensating the parasitic error, but few research the multi-dimensional flexure mechanisms. A general design principle and method for high-precision flexure mechanisms based on the parasitic-motion compensation is presented, and the proposed method can compensate the parasitic rotation in company with translation, or the parasitic translation in company with rotation, or both. The crucial step for the method is that the parasitic motion of a flexure mechanism is formulated and evaluated in terms of its compliance. The overall compliance matrix of a general flexure mechanism is formulated by using screw theory firstly, then the criteria for the parasitic motions is introduced by analyzing the characteristics of the resultant compliance matrix as well as with aid of the concept of instantaneous rotation center. Subsequently, a compliance-based compensation approach for reducing parasitic-motion is addressed as the most important part. The design principles and procedure are further discussed to help with improving the accuracy of flexure mechanisms, and case studies are provided to illustrate this method. Finally, an analytical verification is provided to demonstrate that the symmetry design philosophy widely used in flexure design can effectively improve accuracy in terms of the proposed method. The proposed compensation method can be well used to diminish the parasitic-motion of multi-dimensional flexure mechanisms.