跳到主要导航 跳到搜索 跳到主要内容

Design on the driving mode of MEMS vibratory gyroscope

  • Lab. of Fundamental Sci. for Natl. Defense of Novel Inertial Instrum. and Navigation Syst. Technol.

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy and stability of the system. In the frequency locking circuit, two ways of PLL (Phase Locked Loop) and self-oscillation are used to improve the reliability of the system. Different levels of simulation and circuit implementation are made using the working mode and parameter of the dual-tuner output-quality pieces of silicon MEMS gyroscope which is designed by our own laboratory.

源语言英语
主期刊名Intelligent Robotics and Applications - First International Conference, ICIRA 2008, Proceedings
232-239
页数8
版本PART 2
DOI
出版状态已出版 - 2008
已对外发布
活动1st International Conference on Intelligent Robotics and Applications, ICIRA 2008 - Wuhan, 中国
期限: 15 10月 200817 10月 2008

出版系列

姓名Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
编号PART 2
5315 LNAI
ISSN(印刷版)0302-9743
ISSN(电子版)1611-3349

会议

会议1st International Conference on Intelligent Robotics and Applications, ICIRA 2008
国家/地区中国
Wuhan
时期15/10/0817/10/08

学术指纹

探究 'Design on the driving mode of MEMS vibratory gyroscope' 的科研主题。它们共同构成独一无二的学术指纹。

引用此