TY - GEN
T1 - Design of self-adaptive fuzzy-pid controller based on DSP and FPGA for rapid thermal processing
AU - Liu, Jingmeng
AU - Li, Shangfeng
AU - Wu, Xingming
AU - Chen, Baicheng
PY - 2011
Y1 - 2011
N2 - The features of RTP (rapid thermal processing) temperature control system are analyzed. Regarding TI's DSP chip TMS320LF2407A as the main chip, adopted FPGA for logical and sequential control, temperature controller based on DSP and FPGA has been designed. DSP is used as executing temperature control algorithms and FPGA as logic unit for temperature sampling and display. The hardware configuration and principle is introduced firstly, and then the temperature control algorithm based on self-adaptive fuzzy-PID is designed. Finally, the simulation and experiment results show that the self-adaptive fuzzy-PID controller based on DSP and FPGA has good robustness, rapidity and good dynamic performance. Besides, the structure of hardware design based on DSP and FPGA has four prominent features such as modularization, flexibility, timing and extensibility.
AB - The features of RTP (rapid thermal processing) temperature control system are analyzed. Regarding TI's DSP chip TMS320LF2407A as the main chip, adopted FPGA for logical and sequential control, temperature controller based on DSP and FPGA has been designed. DSP is used as executing temperature control algorithms and FPGA as logic unit for temperature sampling and display. The hardware configuration and principle is introduced firstly, and then the temperature control algorithm based on self-adaptive fuzzy-PID is designed. Finally, the simulation and experiment results show that the self-adaptive fuzzy-PID controller based on DSP and FPGA has good robustness, rapidity and good dynamic performance. Besides, the structure of hardware design based on DSP and FPGA has four prominent features such as modularization, flexibility, timing and extensibility.
KW - DSP and FPGA
KW - rapid thermal processing
KW - self-adaptive fuzzy-PID
KW - temperature control
UR - https://www.scopus.com/pages/publications/80052253698
U2 - 10.1109/ICIEA.2011.5975855
DO - 10.1109/ICIEA.2011.5975855
M3 - 会议稿件
AN - SCOPUS:80052253698
SN - 9781424487554
T3 - Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011
SP - 1649
EP - 1653
BT - Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011
T2 - 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011
Y2 - 21 June 2011 through 23 June 2011
ER -