Design of practical deflection field in nanometer-scale focused ion beam system

Wen Ping Li; Li Han; Wen Qi Gu

doi:10.1016/j.nima.2007.06.012

Design of practical deflection field in nanometer-scale focused ion beam system

Wen Ping Li^*
, Li Han
, Wen Qi Gu

^*此作品的通讯作者

物理学院

CAS - Institute of Electrical Engineering

科研成果: 期刊稿件 › 文章 › 同行评审

2 引用（Scopus）

摘要

Two pre-lens deflectors were optimized to reduce the deflection chromatic aberration in a focused ion optical column. Correction principles of the dynamic focus lens and stigmator were researched in detail. The deflection field curvature, astigmatism and distortion can be eliminated by superposing suitable signals on the objective lens and deflectors, which effectively reduces the complexity of the ion optical column. The optical properties of the two deflectors with dynamic correction were simulated and their power supply circuit was built based on superposition theory of electric signals. When the beam current is 1 nA, the pre-lens deflectors can obtain nanometer-scale focused ion beam at the corner of 0.2×0.2 mm².

源语言	英语
页（从-至）	937-940
页数	4
期刊	Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
卷	579
期	3
DOI	https://doi.org/10.1016/j.nima.2007.06.012
出版状态	已出版 - 11 9月 2007

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title = "Design of practical deflection field in nanometer-scale focused ion beam system",

abstract = "Two pre-lens deflectors were optimized to reduce the deflection chromatic aberration in a focused ion optical column. Correction principles of the dynamic focus lens and stigmator were researched in detail. The deflection field curvature, astigmatism and distortion can be eliminated by superposing suitable signals on the objective lens and deflectors, which effectively reduces the complexity of the ion optical column. The optical properties of the two deflectors with dynamic correction were simulated and their power supply circuit was built based on superposition theory of electric signals. When the beam current is 1 nA, the pre-lens deflectors can obtain nanometer-scale focused ion beam at the corner of 0.2×0.2 mm2.",

keywords = "Dynamic correction, Optimization, Signal superposition, Stigmator",

author = "Li, \{Wen Ping\} and Li Han and Gu, \{Wen Qi\}",

year = "2007",

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doi = "10.1016/j.nima.2007.06.012",

language = "英语",

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T1 - Design of practical deflection field in nanometer-scale focused ion beam system

AU - Li, Wen Ping

AU - Han, Li

AU - Gu, Wen Qi

PY - 2007/9/11

Y1 - 2007/9/11

N2 - Two pre-lens deflectors were optimized to reduce the deflection chromatic aberration in a focused ion optical column. Correction principles of the dynamic focus lens and stigmator were researched in detail. The deflection field curvature, astigmatism and distortion can be eliminated by superposing suitable signals on the objective lens and deflectors, which effectively reduces the complexity of the ion optical column. The optical properties of the two deflectors with dynamic correction were simulated and their power supply circuit was built based on superposition theory of electric signals. When the beam current is 1 nA, the pre-lens deflectors can obtain nanometer-scale focused ion beam at the corner of 0.2×0.2 mm2.

AB - Two pre-lens deflectors were optimized to reduce the deflection chromatic aberration in a focused ion optical column. Correction principles of the dynamic focus lens and stigmator were researched in detail. The deflection field curvature, astigmatism and distortion can be eliminated by superposing suitable signals on the objective lens and deflectors, which effectively reduces the complexity of the ion optical column. The optical properties of the two deflectors with dynamic correction were simulated and their power supply circuit was built based on superposition theory of electric signals. When the beam current is 1 nA, the pre-lens deflectors can obtain nanometer-scale focused ion beam at the corner of 0.2×0.2 mm2.

KW - Dynamic correction

KW - Optimization

KW - Signal superposition

KW - Stigmator

UR - https://www.scopus.com/pages/publications/34547849441

U2 - 10.1016/j.nima.2007.06.012

DO - 10.1016/j.nima.2007.06.012

M3 - 文章

AN - SCOPUS:34547849441

SN - 0168-9002

VL - 579

SP - 937

EP - 940

JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

IS - 3

ER -

Design of practical deflection field in nanometer-scale focused ion beam system

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