Design of High Impact Resistance Micro Hemispherical Resonators for Optical Measurement Systems in Industrial Inspection

Inertial navigation systems are essential for satellite communications, marine navigation, and land vehicle movement, with gyroscopes as a core component. Traditional high-precision systems face limitations in miniaturized platforms due to size, weight, and power constraints. Micro Hemispherical Resonator Gyroscopes (mHRGs), leveraging MEMS technology, offer a compact, high-precision, and shock-resistant solution, ideal for vibration gyroscope applications, particularly in optical measurement systems for industrial inspection. Structural optimization is critical, with parameters like shell radius, thickness, and anchor radius significantly impacting resonant frequency and mode separation. Specific structural parameters achieve the n=2 mode frequency within the 2k~20kHz range while maintaining high shock tolerance. The anchor radius marginally affects the n=2 mode frequency but significantly impacts others. The final designed micro hemispherical resonator features a 5mm shell radius, 0.2mm thickness, and 0.85mm anchor radius, suitable for miniaturization. The n=2 mode frequency is 12441Hz, with the nearest swing mode at 8978Hz, providing a relative difference of 27.8%, sufficient for mode separation and shock resistance. This design meets the 2k~20kHz driving and detection requirements, enhances shock resistance, and advances optical measurement systems for industrial inspection.