TY - GEN
T1 - Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography
AU - Du, Chong
AU - Chen, Weihai
AU - Wu, Yunjie
AU - Chen, Wenjie
AU - Yuan, Mei
PY - 2012
Y1 - 2012
N2 - Ultra-precision off-plane alignment between the template and the substrate is of great importance to guarantee the quality of patterns manufactured by nanoimprint lithography technology. In this paper, an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography is developed. The high light of the mechanical design is that the imprint force is transmitted by a spherical aerostatic bearing to the high stiffness frame, thus, bypassing the compliant mechanism, which is employed for high precision off-plane adjustments. This makes the developed device suitable for high load applications while maintaining high alignment precision. The load capacity and stiffness of the imprint device, which are mostly determined by the aerostatic bearing, are studied based on theoretical analysis and experiments. To further increase the stiffness of the device, adjustable magnetic preload is employed. An experiment is performed to study the mechanical characteristics of the imprint head incorporating the magnetic preload structure.
AB - Ultra-precision off-plane alignment between the template and the substrate is of great importance to guarantee the quality of patterns manufactured by nanoimprint lithography technology. In this paper, an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography is developed. The high light of the mechanical design is that the imprint force is transmitted by a spherical aerostatic bearing to the high stiffness frame, thus, bypassing the compliant mechanism, which is employed for high precision off-plane adjustments. This makes the developed device suitable for high load applications while maintaining high alignment precision. The load capacity and stiffness of the imprint device, which are mostly determined by the aerostatic bearing, are studied based on theoretical analysis and experiments. To further increase the stiffness of the device, adjustable magnetic preload is employed. An experiment is performed to study the mechanical characteristics of the imprint head incorporating the magnetic preload structure.
UR - https://www.scopus.com/pages/publications/84876468385
U2 - 10.1109/ROBIO.2012.6491099
DO - 10.1109/ROBIO.2012.6491099
M3 - 会议稿件
AN - SCOPUS:84876468385
SN - 9781467321273
T3 - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest
SP - 999
EP - 1004
BT - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest
T2 - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012
Y2 - 11 December 2012 through 14 December 2012
ER -