@inproceedings{a3523a2382f54643bf60468a8de18656,
title = "Design of a high-sensitivity micromechanical resonant accelerometer with a two-stage microlever",
abstract = "A novel micromechanical silicon resonant accelerometer with a two-stage microlever mechanism and dual-proofmass architecture was presented to achieve a higher sensitivity and stability. According to the mechanical model of the two-stage microlever, the ANSYS simulations were performed to analyze the effects of structural parameters, including lever structure dimensions and the ratio of lever power arm to lever resisting arm, on the scale factor and the operating modal frequency of accelerometer. Furthermore, the dual-proofmass architecture effectively removed the {"}blind zone{"} resulted from a {"}lock-in{"} phenomenon at the crossing frequency. In consideration of the tradeoff of the acceleration sensitivity and the operating modal frequency of 1.2 kHz, the designed accelerometer achieved a sensitivity of 430 Hz/g and a linear accuracy of 5\%o with a nominal resonant frequency of 22482 Hz in the range of±30 g.",
keywords = "Simulation analysis, high sensitivity, resonant accelerometer, two-stage microlever",
author = "Wen Yue and Li Cheng and Fan, \{Shang Chun\} and Kan, \{Bao Xi\} and Chao Wang",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; IEEE Advanced Information Technology, Electronic and Automation Control Conference, IAEAC 2015 ; Conference date: 19-12-2015 Through 20-12-2015",
year = "2016",
month = mar,
day = "7",
doi = "10.1109/IAEAC.2015.7428718",
language = "英语",
series = "Proceedings of 2015 IEEE Advanced Information Technology, Electronic and Automation Control Conference, IAEAC 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1052--1055",
editor = "Bing Xu",
booktitle = "Proceedings of 2015 IEEE Advanced Information Technology, Electronic and Automation Control Conference, IAEAC 2015",
address = "美国",
}