Design and finite element analysis of MOEMS gyroscope micro-actuators

This paper reports on a structure model of a lead-zirconate titanate (PZT) thin film micro-actuator. This actuator, which is fabricated with the PZT material of high d₃₃ characterization, has been used to precisely control the displacement and the angle of the micro mirror in spatial resonance MOEMS gyroscope. The predigestion model of the actuator is set up, and its driving ability has been analyzed with the finite element method. As it is shown in the result, when the micro-actuator with two layers of PZT thin film has an applied voltage of 50 V, the center displacement of the displacement actuator could be 0. 345 μm, and the deflexion angle of the angle actuator could be 3. 29′. Also, if the layers of the PZT thin film are added, the actuate ability to the displacement and angle would be better. Results indicates that this actuator which is made by multi-layer PZT thin film has the ability to satisfy the actuate range and precision requirement of the micro mirror displacement and angle actuator.