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Design and comparison of three-type VCMs for nano-positioning system

  • Liang Dong
  • , Jinhua Chen
  • , Chi Zhang*
  • , Dingbing Wu
  • , Guangwei Yu
  • , Qiang Liu
  • *此作品的通讯作者
  • CAS - Ningbo Institute of Material Technology and Engineering
  • Shanghai University

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

This paper introduces three-type voice coil motors (VCMs) for nano-positioning system. These VCMs all consists dual-magnet stator and coil mover which is sandwiched between these two-layer magnets with different topology structures of the stators and movers. The motor structures, magnetic field distribution, thrust force and force ripple of these VCMs are studied and compared. Equivalent magnetic circuit method and the finite element analysis (FEA) are employed to analyze the performance of these VCMs. The results show that the VCM with Halbach array permanent magnets and three-segment coil mover has the largest force constant and smallest force ripple. A prototype of the Halbach VCM is manufactured and tested. The experimental results accord well with which of the simulation.

源语言英语
主期刊名Proceedings of the 2016 IEEE 11th Conference on Industrial Electronics and Applications, ICIEA 2016
出版商Institute of Electrical and Electronics Engineers Inc.
1656-1660
页数5
ISBN(电子版)9781509026050
DOI
出版状态已出版 - 19 10月 2016
已对外发布
活动11th IEEE Conference on Industrial Electronics and Applications, ICIEA 2016 - Hefei, 中国
期限: 5 6月 20167 6月 2016

出版系列

姓名Proceedings of the 2016 IEEE 11th Conference on Industrial Electronics and Applications, ICIEA 2016

会议

会议11th IEEE Conference on Industrial Electronics and Applications, ICIEA 2016
国家/地区中国
Hefei
时期5/06/167/06/16

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