TY - GEN
T1 - Design and analysis of a new flexure-based XY micropositioning stage with decoupled motion characteristic
AU - Sun, Xiantao
AU - Chen, Weihai
AU - Zhou, Rui
AU - Zhang, Jianbin
AU - Chen, Wenjie
PY - 2012
Y1 - 2012
N2 - In this paper, a new two translational degrees of freedom (DOFs) flexure-based micromotion stage (FMMS) is presented. Two flexure-beam joints are used to design the stage for large motion range and meanwhile the symmetric layout of four kinematic chains restricts its parasitic motion in the XY plane. A detailed analytical model is established to evaluate the parasitic motion and dynamic property of the stage. Finite element simulations are carried out to inspect the performance and verify the theoretical model. Finally, the prototype is fabricated for performance tests. Linear and circular trajectory tests indicate that the proposed stage has a large workspace of about ±300 × ±300 μm2 with the maximum relative coupling error of 0.6%, and good positioning and tracking performances. In addition, the results from dynamic tests show that the natural frequencies for two translational vibrations are 209.7 Hz and 212.4 Hz, respectively.
AB - In this paper, a new two translational degrees of freedom (DOFs) flexure-based micromotion stage (FMMS) is presented. Two flexure-beam joints are used to design the stage for large motion range and meanwhile the symmetric layout of four kinematic chains restricts its parasitic motion in the XY plane. A detailed analytical model is established to evaluate the parasitic motion and dynamic property of the stage. Finite element simulations are carried out to inspect the performance and verify the theoretical model. Finally, the prototype is fabricated for performance tests. Linear and circular trajectory tests indicate that the proposed stage has a large workspace of about ±300 × ±300 μm2 with the maximum relative coupling error of 0.6%, and good positioning and tracking performances. In addition, the results from dynamic tests show that the natural frequencies for two translational vibrations are 209.7 Hz and 212.4 Hz, respectively.
UR - https://www.scopus.com/pages/publications/84876479259
U2 - 10.1109/ROBIO.2012.6491101
DO - 10.1109/ROBIO.2012.6491101
M3 - 会议稿件
AN - SCOPUS:84876479259
SN - 9781467321273
T3 - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest
SP - 1011
EP - 1016
BT - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest
T2 - 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012
Y2 - 11 December 2012 through 14 December 2012
ER -