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Deep level transient spectroscopy and TEM analysis of defects in Eu implanted GaN

  • A. Colder
  • , T. Wojtowicz*
  • , P. Marie
  • , P. Ruterana
  • , V. Matias
  • , M. Mamor
  • , A. Vantomme
  • , S. Eimer
  • , L. Méchin
  • *此作品的通讯作者
  • CNRS
  • KU Leuven
  • GREYC - Groupe de Recherche en Informatique, Image, Automatique et Instrumentation de Caen

科研成果: 期刊稿件文章同行评审

摘要

Deep level transient spectroscopy (DLTS) and transmission electron microscopy (TEM) are used to study europium implanted gallium nitride layers. The implantation was realised at room temperature in the random and channeled geometries. From DLTS, we determine intrinsic defects with associated levels located in the band gap (below the conduction band). Besides, we point out a new electron trap named Eu2. Its associated level is located at about Ec -0.36 eV and the defect is probably related to the europium rare-earth ion. TEM investigation shows a difference in structure caused by changing the geometry of implantation. The random implanted sample contains numerous planar defects.

源语言英语
页(从-至)2450-2453
页数4
期刊Physica Status Solidi C: Conferences
2
7
DOI
出版状态已出版 - 2005
已对外发布

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