Data processing and testing of the open-loop characteristics for the silicon resonant microsensor

For the sake of calculating the resonant frequency, resonant amplitude and quality factor of silicon resonant microsensor accurately, several data processing algorithms such as lowpass and reformative method of least squares are analyzed and compared by emulation and experiments, based on the theoretical model of silicon resonant microsensor and the actual data acquired by the Open-loop characteristics test, and the holistic best algorithm is found. The program designed is the special data processing program of the Open-loop characteristics test system developed by, but the algorithms discussed in this paper can also be applied to similar data processing and have extensive referrible value.