AZO与ITO薄膜电磁散射特性对比试验研究

Zhanhe Liu; Xiaolu Wang; Jing Wang; Jinzu Ji; Peng Zhou; Hui Zhao

doi:10.13922/j.cnki.cjovst.2018.04.10

AZO与ITO薄膜电磁散射特性对比试验研究

Zhanhe Liu^*
, Xiaolu Wang
, Jing Wang
, Jinzu Ji
, Peng Zhou
, Hui Zhao

^*此作品的通讯作者

航空科学与工程学院

Zhengzhou University of Aeronautics

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Herein,we reported the electromagnetic stealth behavior of the Al-doped zinc oxide (AZO) and indium tin oxides (ITO) coatings,deposited by unbalanced magnetron sputtering on glass substrate. The influence of the sheet resistance and transmittance on the electromagnetic scattering of the AZO/ITO coatings was theoretically analyzed and experimentally evaluated by measuring the Radar Cross-Section (CRS),irradiated at 10 GHz/15 GHz and polarized in Horizontal-Horizontal (HH)/Vertical-Vertical (VV) modes. The results show that the sheet resistance strongly affected the RCS curves with similar structures of the AZO/ITO coatings. For example,as the sheet resistance increased,their RCS gains oscillatingly decreased,with that of AZO film oscillating more obviously. We suggest that the AZO and ITO coatings with the optimized sheet resistance may do an excellent job for cockpit glass stealth.

投稿的翻译标题	Electromagnetic Scattering Characteristics of AZO and ITO Coatings: An Experimental Study
源语言	繁体中文
页（从-至）	313-319
页数	7
期刊	Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
卷	38
期	4
DOI	https://doi.org/10.13922/j.cnki.cjovst.2018.04.10
出版状态	已出版 - 1 4月 2018

关键词

AZO
Electromagnetic scattering
Film
ITO
RCS
Stealth

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10.13922/j.cnki.cjovst.2018.04.10

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引用此

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title = "AZO与ITO薄膜电磁散射特性对比试验研究",

abstract = "Herein,we reported the electromagnetic stealth behavior of the Al-doped zinc oxide (AZO) and indium tin oxides (ITO) coatings,deposited by unbalanced magnetron sputtering on glass substrate. The influence of the sheet resistance and transmittance on the electromagnetic scattering of the AZO/ITO coatings was theoretically analyzed and experimentally evaluated by measuring the Radar Cross-Section (CRS),irradiated at 10 GHz/15 GHz and polarized in Horizontal-Horizontal (HH)/Vertical-Vertical (VV) modes. The results show that the sheet resistance strongly affected the RCS curves with similar structures of the AZO/ITO coatings. For example,as the sheet resistance increased,their RCS gains oscillatingly decreased,with that of AZO film oscillating more obviously. We suggest that the AZO and ITO coatings with the optimized sheet resistance may do an excellent job for cockpit glass stealth.",

keywords = "AZO, Electromagnetic scattering, Film, ITO, RCS, Stealth",

author = "Zhanhe Liu and Xiaolu Wang and Jing Wang and Jinzu Ji and Peng Zhou and Hui Zhao",

year = "2018",

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doi = "10.13922/j.cnki.cjovst.2018.04.10",

language = "繁体中文",

volume = "38",

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TY - JOUR

T1 - AZO与ITO薄膜电磁散射特性对比试验研究

AU - Liu, Zhanhe

AU - Wang, Xiaolu

AU - Wang, Jing

AU - Ji, Jinzu

AU - Zhou, Peng

AU - Zhao, Hui

PY - 2018/4/1

Y1 - 2018/4/1

N2 - Herein,we reported the electromagnetic stealth behavior of the Al-doped zinc oxide (AZO) and indium tin oxides (ITO) coatings,deposited by unbalanced magnetron sputtering on glass substrate. The influence of the sheet resistance and transmittance on the electromagnetic scattering of the AZO/ITO coatings was theoretically analyzed and experimentally evaluated by measuring the Radar Cross-Section (CRS),irradiated at 10 GHz/15 GHz and polarized in Horizontal-Horizontal (HH)/Vertical-Vertical (VV) modes. The results show that the sheet resistance strongly affected the RCS curves with similar structures of the AZO/ITO coatings. For example,as the sheet resistance increased,their RCS gains oscillatingly decreased,with that of AZO film oscillating more obviously. We suggest that the AZO and ITO coatings with the optimized sheet resistance may do an excellent job for cockpit glass stealth.

AB - Herein,we reported the electromagnetic stealth behavior of the Al-doped zinc oxide (AZO) and indium tin oxides (ITO) coatings,deposited by unbalanced magnetron sputtering on glass substrate. The influence of the sheet resistance and transmittance on the electromagnetic scattering of the AZO/ITO coatings was theoretically analyzed and experimentally evaluated by measuring the Radar Cross-Section (CRS),irradiated at 10 GHz/15 GHz and polarized in Horizontal-Horizontal (HH)/Vertical-Vertical (VV) modes. The results show that the sheet resistance strongly affected the RCS curves with similar structures of the AZO/ITO coatings. For example,as the sheet resistance increased,their RCS gains oscillatingly decreased,with that of AZO film oscillating more obviously. We suggest that the AZO and ITO coatings with the optimized sheet resistance may do an excellent job for cockpit glass stealth.

KW - AZO

KW - Electromagnetic scattering

KW - Film

KW - ITO

KW - RCS

KW - Stealth

UR - https://www.scopus.com/pages/publications/85062673455

U2 - 10.13922/j.cnki.cjovst.2018.04.10

DO - 10.13922/j.cnki.cjovst.2018.04.10

M3 - 文章

AN - SCOPUS:85062673455

SN - 1672-7126

VL - 38

SP - 313

EP - 319

JO - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

JF - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

IS - 4

ER -

AZO与ITO薄膜电磁散射特性对比试验研究

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