Application of noncontact measurement method to the torque measurement of micromotors

A noncontact measurement method has been proposed for measuring the pull-out torque of micromotors in order to overcome the problem of large measurement errors due to temperature, vibration, friction and the flow of air. The principle of the proposed method was explained and the measurement precisions of rotational speed and output torque of a micromotor were analyzed in detail. Through a measurement test of a micromotor fabricated with the MEMS process, it has been verified that this method has high precision and can satisfy the requirement of micro Nm torque measurement of micromotors.