TY - GEN
T1 - Analysis of vibration characteristics of rolling linear guides
AU - Zheng, Shicheng
AU - Li, Wanguo
AU - Fu, Yongling
AU - Du, Chang
AU - Li, Chen
AU - Li, Linjie
N1 - Publisher Copyright:
© 2020 ACM.
PY - 2020/10/15
Y1 - 2020/10/15
N2 - The motion accuracy of the system is directly affected by the vibration characteristics of the components. In this paper, the ball linear guides for high-precision mobile platforms for chip inspection equipment are taken as research objects, and their vibration characteristics are analyzed. Based on the theoretical analysis of the contact characteristics of the contact pair based on HertZ theory, the finite element analysis software was used to analyze the modal of the ball linear guide. Among them, the change of normal contact stiffness has a greater impact on the system modal. The material and structural characteristics of the contact pair are the main factors affecting the natural frequency of the system. The magnitudes of each mode and the first six natural frequencies are given. Based on Newtonian mechanics, a mathematical model of the collision between the ball and the returner is established, and the influence of the structural parameters on the collision force is analyzed. The impact of the turning radius on the impact force is negligible, and the initial relative speed, ball mass, and elastic modulus have a greater impact on the impact force. For the ball linear guide rails studied in this paper, the impact force of the ball on the system during the movement is less than 40N, and the vibration shock frequency is less than 7.5Hz. It lays the foundation for the follow-up compensation of the collision force by using the motor feedforward control method, and improves the system's motion accuracy and positioning accuracy.
AB - The motion accuracy of the system is directly affected by the vibration characteristics of the components. In this paper, the ball linear guides for high-precision mobile platforms for chip inspection equipment are taken as research objects, and their vibration characteristics are analyzed. Based on the theoretical analysis of the contact characteristics of the contact pair based on HertZ theory, the finite element analysis software was used to analyze the modal of the ball linear guide. Among them, the change of normal contact stiffness has a greater impact on the system modal. The material and structural characteristics of the contact pair are the main factors affecting the natural frequency of the system. The magnitudes of each mode and the first six natural frequencies are given. Based on Newtonian mechanics, a mathematical model of the collision between the ball and the returner is established, and the influence of the structural parameters on the collision force is analyzed. The impact of the turning radius on the impact force is negligible, and the initial relative speed, ball mass, and elastic modulus have a greater impact on the impact force. For the ball linear guide rails studied in this paper, the impact force of the ball on the system during the movement is less than 40N, and the vibration shock frequency is less than 7.5Hz. It lays the foundation for the follow-up compensation of the collision force by using the motor feedforward control method, and improves the system's motion accuracy and positioning accuracy.
KW - Analysis of vibration characteristics
KW - Collision force
KW - Impact frequency
KW - Natural frequency
UR - https://www.scopus.com/pages/publications/85095827445
U2 - 10.1145/3421766.3421864
DO - 10.1145/3421766.3421864
M3 - 会议稿件
AN - SCOPUS:85095827445
T3 - ACM International Conference Proceeding Series
SP - 318
EP - 325
BT - Proceedings, AIAM 2020 - 2nd International Conference on Artificial Intelligence and Advanced Manufacture
PB - Association for Computing Machinery
T2 - 2nd International Conference on Artificial Intelligence and Advanced Manufacture, AIAM 2020
Y2 - 15 October 2020 through 17 October 2020
ER -