TY - GEN
T1 - An Ear-Inspired Sound Pressure Amplification Structure for Fabry-Perot Acoustic Sensor
AU - Xiao, Xi
AU - Li, Cheng
AU - Fan, Shangchun
AU - Song, Xuefeng
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/6/20
Y1 - 2021/6/20
N2 - In this paper, inspired by the ossicular chain in human middle ear, a miniature sound pressure amplification structure (SPAS) based on double 10-thickness E-shaped steel diaphragms with the corresponding diameters of 15 mm and 3 mm was developed to enhance the sensitivity of diaphragm-type Fabry-Perot (F-P) acoustic sensor. FEM simulation demonstrated the availability of the SPAS in terms of the achieved acoustic field response within a certain frequency range. Then acoustic test showed that the F-P acoustic sensor using a silver diaphragm, adapted with the developed SPAS, achieved a remarkable sensitivity amplification ratio of up to 7.6 in the range of 1.52.1 kHz, which can be further widened by optimizing structure dimensions and membrane materials.
AB - In this paper, inspired by the ossicular chain in human middle ear, a miniature sound pressure amplification structure (SPAS) based on double 10-thickness E-shaped steel diaphragms with the corresponding diameters of 15 mm and 3 mm was developed to enhance the sensitivity of diaphragm-type Fabry-Perot (F-P) acoustic sensor. FEM simulation demonstrated the availability of the SPAS in terms of the achieved acoustic field response within a certain frequency range. Then acoustic test showed that the F-P acoustic sensor using a silver diaphragm, adapted with the developed SPAS, achieved a remarkable sensitivity amplification ratio of up to 7.6 in the range of 1.52.1 kHz, which can be further widened by optimizing structure dimensions and membrane materials.
KW - Acoustic pressure
KW - Fabry-Perot
KW - ear-inspired amplification structure
KW - optical fiber sensor
KW - sensitivity enhancement
UR - https://www.scopus.com/pages/publications/85114964804
U2 - 10.1109/Transducers50396.2021.9495434
DO - 10.1109/Transducers50396.2021.9495434
M3 - 会议稿件
AN - SCOPUS:85114964804
T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
SP - 1174
EP - 1177
BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Y2 - 20 June 2021 through 25 June 2021
ER -