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Aluminum migration on the die surfaces of a power transistor in high-intensity electric fields

  • Jingsong Xie*
  • , Jing Jing He
  • , Patrick McCluskey
  • *此作品的通讯作者
  • Beihang University
  • University of Maryland, College Park

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

This paper presents the results of an investigation on a phenomenon of aluminum migration across a 50 micron semi-insulation gap on the die surface of a power silicon transistor under a high-intensity electric field. The transistor is manufactured using a typical planar process with aluminum as the metallization material. The electric field is induced by a reverse bias of over 500V across the 50 micron semi-insulation gap between the collector and the base. A preliminary energy dispersive x-ray (EDX) analysis has verified the migration material of aluminum. It is clear that this migration described above is not the so-called electromigration, a process that takes place under the condition of high-density current when significant momentum transfer occurs from moving charge carriers to crystal lattice. The investigation results obtained in this preliminary study also indicate that this migration is different from the electrochemical migration, because no evidence has so far been found that moisture and the existence of electrolyte is noticeably a necessary condition for the occurrence of the migration. In addition, the existence of a lower threshold voltage observed in the study for this migration phenomenon is not considered a necessary condition for electrochemical migration either. This paper presents a preliminary study to verify the chemical composition of the substances involved in the migration process, and to identify the environmental conditions of temperature and relative humidity, as well as the electric field and reverse bias conditions necessary to initiate the migration process. The migration process will also be characterized under different conditions in this study to provide information for reliability modeling and failure prediction in follow-up studies.

源语言英语
主期刊名Proceedings - 2007 International Symposium on Microelectronics, IMAPS 2007
648-655
页数8
出版状态已出版 - 2007
活动40th International Symposium on Microelectronics, IMAPS 2007 - San Jose, CA, 美国
期限: 11 11月 200715 11月 2007

出版系列

姓名Proceedings - 2007 International Symposium on Microelectronics, IMAPS 2007

会议

会议40th International Symposium on Microelectronics, IMAPS 2007
国家/地区美国
San Jose, CA
时期11/11/0715/11/07

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