Accuracy analysis of micromanipulator

To allocate reasonably accuracy of the structural parameters for micro-manipulator and to evaluate effects of their errors on pose accuracy of terminate actuator, it is important to build positive-inverse kinematics model including each terms of structural errors. The serial-parallel mechanism with six DOF was considered. The relations between the pose accuracy and manufacturing tolerance, actuation errors, and installation errors were derived by using vector arithmetic method. The error analysis of the mechanism was discussed. Some conclusions, which are very useful to the design and manufacturing of the micro-manipulator, were given.