@inproceedings{fb68f3d75ce54d559360dff30e7dcc09,
title = "A study on RF discharge characteristics of argon in multi-physics field",
abstract = "Belongs to the problem of discharge hazards together with ESD, RF discharge, whose characteristics are influenced by different experimental conditions, is studied. The conclusions of RF discharge characteristics of argon are given through theoretical analysis and multi-physics simulation.",
keywords = "RF discharge, frequency, multi-physics, simulation",
author = "Xiaoyao Feng and Fei Dai",
note = "Publisher Copyright: {\textcopyright} 2017 Applied Computational Electromagnetics Society.; 2017 International Applied Computational Electromagnetics Society Symposium in China, ACES-China 2017 ; Conference date: 01-08-2017 Through 04-08-2017",
year = "2017",
month = sep,
day = "26",
language = "英语",
series = "2017 International Applied Computational Electromagnetics Society Symposium in China, ACES-China 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2017 International Applied Computational Electromagnetics Society Symposium in China, ACES-China 2017",
address = "美国",
}