@inproceedings{b8b82a1b56194556804e3f2d9997ee15,
title = "A study of the properties of RF sputtered MgXZn1-xO thin films",
abstract = "MgxZn1-xO, a ZnO-based ternary compound, has been recognized as a promising material to be used in UV light emitting devices, UV laser diodes and UV detectors. In this paper, a batch of MgxZn 1-xO films were fabricated using radio frequency sputtering on glass substrates with a Mg032Zn068O target. Then the structure and the optical properties of these films after being treated at different annealing temperatures were studied.",
keywords = "Annealing, MgZnO, RF sputtered, Thin films",
author = "Lei Yu and Zhao Li and Cui Yi-min and Zhang, \{Zhi Yong\}",
year = "2008",
doi = "10.1109/COMMAD.2008.4802087",
language = "英语",
isbn = "9781424427178",
series = "Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD",
pages = "38--40",
booktitle = "Proceedings of the 2008 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD'08",
note = "2008 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD'08 ; Conference date: 28-07-2008 Through 01-08-2008",
}