A QCM dew point sensor with active temperature control using thermally conductive electrodes

Ning Li; Xiaofeng Meng; Jing Nie; Liwei Lin

doi:10.1109/JSEN.2018.2840124

A QCM dew point sensor with active temperature control using thermally conductive electrodes

Ning Li
, Xiaofeng Meng
, Jing Nie^*
, Liwei Lin

^*此作品的通讯作者

Beihang University
University of California at Berkeley

科研成果: 期刊稿件 › 文章 › 同行评审

11 引用（Scopus）

摘要

A dew point (DP) sensor structure was proposed with active temperature control using the thermally conductive electrodes on the quartz crystal microbalance (QCM). Two copper wires were bonded on both sides of the QCM via the conductive adhesive as the main heat transfer components. The transmittal of the temperature and the fixation of sensitive cell were realized by the connection of electrode pins. Finite element analysis was carried out to theoretically validate the high-temperature transfer efficiency and good vibration characteristics of the structure with optimal dimensions. Gases with different DP were measured to evaluate the performance of the sensor. The accuracy of the DP sensor was found to be ±0.22 °C DP in the range of 5 °C DP 16 °C DP by referencing to a commercial MICHELL S4000 DP meter.

源语言	英语
页（从-至）	5715-5722
页数	8
期刊	IEEE Sensors Journal
卷	18
期	14
DOI	https://doi.org/10.1109/JSEN.2018.2840124
出版状态	已出版 - 15 7月 2018
已对外发布	是

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title = "A QCM dew point sensor with active temperature control using thermally conductive electrodes",

abstract = "A dew point (DP) sensor structure was proposed with active temperature control using the thermally conductive electrodes on the quartz crystal microbalance (QCM). Two copper wires were bonded on both sides of the QCM via the conductive adhesive as the main heat transfer components. The transmittal of the temperature and the fixation of sensitive cell were realized by the connection of electrode pins. Finite element analysis was carried out to theoretically validate the high-temperature transfer efficiency and good vibration characteristics of the structure with optimal dimensions. Gases with different DP were measured to evaluate the performance of the sensor. The accuracy of the DP sensor was found to be ±0.22 °C DP in the range of 5 °C DP 16 °C DP by referencing to a commercial MICHELL S4000 DP meter.",

keywords = "Humidity, dew point sensor, electrode, quartz crystal microbalance, thermal transfer",

author = "Ning Li and Xiaofeng Meng and Jing Nie and Liwei Lin",

note = "Publisher Copyright: {\textcopyright} 2001-2012 IEEE.",

year = "2018",

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T1 - A QCM dew point sensor with active temperature control using thermally conductive electrodes

AU - Li, Ning

AU - Meng, Xiaofeng

AU - Nie, Jing

AU - Lin, Liwei

PY - 2018/7/15

Y1 - 2018/7/15

N2 - A dew point (DP) sensor structure was proposed with active temperature control using the thermally conductive electrodes on the quartz crystal microbalance (QCM). Two copper wires were bonded on both sides of the QCM via the conductive adhesive as the main heat transfer components. The transmittal of the temperature and the fixation of sensitive cell were realized by the connection of electrode pins. Finite element analysis was carried out to theoretically validate the high-temperature transfer efficiency and good vibration characteristics of the structure with optimal dimensions. Gases with different DP were measured to evaluate the performance of the sensor. The accuracy of the DP sensor was found to be ±0.22 °C DP in the range of 5 °C DP 16 °C DP by referencing to a commercial MICHELL S4000 DP meter.

AB - A dew point (DP) sensor structure was proposed with active temperature control using the thermally conductive electrodes on the quartz crystal microbalance (QCM). Two copper wires were bonded on both sides of the QCM via the conductive adhesive as the main heat transfer components. The transmittal of the temperature and the fixation of sensitive cell were realized by the connection of electrode pins. Finite element analysis was carried out to theoretically validate the high-temperature transfer efficiency and good vibration characteristics of the structure with optimal dimensions. Gases with different DP were measured to evaluate the performance of the sensor. The accuracy of the DP sensor was found to be ±0.22 °C DP in the range of 5 °C DP 16 °C DP by referencing to a commercial MICHELL S4000 DP meter.

KW - Humidity

KW - dew point sensor

KW - electrode

KW - quartz crystal microbalance

KW - thermal transfer

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JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

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ER -

A QCM dew point sensor with active temperature control using thermally conductive electrodes

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