@inproceedings{0cb25da41e97498387fe80099c5c6b40,
title = "A Piezoelectric Micro-Machined Ultrasonic Transducer Array Based on Flexible Substrate",
abstract = "Flexible electronic devices are developing rapidly, especially in the medical field. This paper reports a flexible piezoelectric micro-machined ultrasonic transducer (FPMUT) array. In the designing process, we utilize the flexible interconnection as the electrical connecting wire between piezoelectric ceramics array. Meanwhile, the polydimethylsiloxane (PDMS) films act as flexible substrates for the whole device. It has flexibility and good conformal contacting with skin surfaces. This sandwich-structure of the FPMUT has a combination of rigid and flexible features. It also has great potential for the application in ultrasound medicine in the future and could bring them closer to commercial production.",
keywords = "flexible substrate, micro-machined, piezoelectric, ultrasonic transducer array",
author = "Qifeng Zhu and Lue Zhang and Huicong Liu and Tao Chen and Lining Sun and Xianhao Le and Jin Xie",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018 ; Conference date: 22-04-2018 Through 26-04-2018",
year = "2018",
month = dec,
day = "3",
doi = "10.1109/NEMS.2018.8556929",
language = "英语",
series = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "345--348",
booktitle = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
address = "美国",
}