A numerical method for calculating electromagnetic character of RF MEMS devices with time-varying structures

With the development of radio frequency micro-electro-mechnical system (RF MEMS) technology, more and more RF MEMS devices are used for RF front-end in WSN nodes. It is the key factor that to learn the electromagnetic character of RF MEMS devices in the design of WSN nodes. To analysis the electromagnetic character of RF MEMS devices, with time-varying structures in numerical simulation. A coupling of electromagnetic and mechanical model is build. A new method is proposed, that is 'dielectric parameter interpolations', based on FDTD method. Main ideas of linear dielectric interpolation method are discussed, and calculating formula is derived for one dimensional. The preliminary simulation results show that the method is easy to understand, implement and efficient.