@inproceedings{dbfd3a6afff64cafbadb086f918e58dc,
title = "A Novel Terahertz Waveguide Filter Based on MEMS Technology",
abstract = "This paper presents high performance 0.34THz waveguide filters based on MEMS technology. The relationship between fabrication error and filter performance was studied and a quantitative model is given. The fabrication geometrical tolerance can be controlled to be lower than 5\% for iris structures (and ±5μm for resonant cavities). Our test results show a good agreement with simulation results when fabrication error is less than \textasciitilde{}5 μm, the test result shows a performance of \textasciitilde{}0.5dB insertion with \textasciitilde{}5.29\% relative bandwidth.",
keywords = "MEMS, THz, Waveguides",
author = "Shan, \{G. C.\} and N. Zhang and Z. Yan and Shek, \{C. H.\}",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 IEEE MTT-S International Wireless Symposium, IWS 2019 ; Conference date: 19-05-2019 Through 22-05-2019",
year = "2019",
month = may,
doi = "10.1109/IEEE-IWS.2019.8803867",
language = "英语",
series = "2019 IEEE MTT-S International Wireless Symposium, IWS 2019 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2019 IEEE MTT-S International Wireless Symposium, IWS 2019 - Proceedings",
address = "美国",
}