摘要
In contrast to null compensator method in aspheric surface testing, a novel method is presented that uses part-compensating lens and digital moiré phase-shift interferometry. Researches are made on measurement principle, design method of part-compensating lens and calibrating lens, and calibrating method. Experiment is made by using spherical surface to simulate aspheric surface testing. The measurement precision is that the P-V value of the testing error can be λ/10. Using the method presented in this paper, the structure of compensator is much simpler than that of null compensator. And one part-compensating lens can be used to test different aspheric surfaces in certain range.
| 源语言 | 英语 |
|---|---|
| 文章编号 | 52 |
| 页(从-至) | 324-329 |
| 页数 | 6 |
| 期刊 | Proceedings of SPIE - The International Society for Optical Engineering |
| 卷 | 5638 |
| 期 | PART 1 |
| DOI | |
| 出版状态 | 已出版 - 2005 |
| 活动 | Optical Design and Testing II - Beijing, 美国 期限: 8 11月 2004 → 11 11月 2004 |
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