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A novel aspheric surface testing method using part-compensating lens

科研成果: 期刊稿件会议文章同行评审

摘要

In contrast to null compensator method in aspheric surface testing, a novel method is presented that uses part-compensating lens and digital moiré phase-shift interferometry. Researches are made on measurement principle, design method of part-compensating lens and calibrating lens, and calibrating method. Experiment is made by using spherical surface to simulate aspheric surface testing. The measurement precision is that the P-V value of the testing error can be λ/10. Using the method presented in this paper, the structure of compensator is much simpler than that of null compensator. And one part-compensating lens can be used to test different aspheric surfaces in certain range.

源语言英语
文章编号52
页(从-至)324-329
页数6
期刊Proceedings of SPIE - The International Society for Optical Engineering
5638
PART 1
DOI
出版状态已出版 - 2005
活动Optical Design and Testing II - Beijing, 美国
期限: 8 11月 200411 11月 2004

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