TY - GEN
T1 - A nanometer-resolution displacement measurement system based on laser feedback interferometry
AU - Liu, Huilan
AU - Yao, Heming
AU - Feng, Lishuang
PY - 2013
Y1 - 2013
N2 - Based on laser feedback interferometry (LFI) combined with phase-freezing technology (PFT), a novel displacement measurement system is demonstrated, which improves the measurement resolution to nanometer scale. The phase modulator is added to modulate the external cavity phase, and the PFT is used for sampling and demodulation. The displacement information of the external target is reconstructed. The signal modulation, sampling, reconstruction technology is researched and the simulation results show the feasibility of the method. Error analysis is made for searching the influence of modulation frequency, sampling frequency and reflector vibration frequency. Verification experiment is made to check the accuracy of the system with appropriate parameters. It provides a displacement and vibration measurement method for MEMS elements.
AB - Based on laser feedback interferometry (LFI) combined with phase-freezing technology (PFT), a novel displacement measurement system is demonstrated, which improves the measurement resolution to nanometer scale. The phase modulator is added to modulate the external cavity phase, and the PFT is used for sampling and demodulation. The displacement information of the external target is reconstructed. The signal modulation, sampling, reconstruction technology is researched and the simulation results show the feasibility of the method. Error analysis is made for searching the influence of modulation frequency, sampling frequency and reflector vibration frequency. Verification experiment is made to check the accuracy of the system with appropriate parameters. It provides a displacement and vibration measurement method for MEMS elements.
KW - displacement measurement
KW - laser feedback interferometry
KW - phase modulator
KW - phase-freezing technology
UR - https://www.scopus.com/pages/publications/84883096937
U2 - 10.1109/NEMS.2013.6559953
DO - 10.1109/NEMS.2013.6559953
M3 - 会议稿件
AN - SCOPUS:84883096937
SN - 9781467363525
T3 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
SP - 1295
EP - 1298
BT - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
T2 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Y2 - 7 April 2013 through 10 April 2013
ER -