@inproceedings{349b38bdbe424ba79ea7d1977099ff2b,
title = "A monolithic integrated micromachined piezoresistive flow sensor",
abstract = "In this paper, a monolithic integrated piezoresistive flow sensor is presented, which was fabricated with an intermediate CMOS MEMS process compatible with pressure sensors. Four symmetrically arranged silicon diaphragms with piezoresistors on them are used to sense the drag force induced by the input gas flow. Signal conditioning CMOS circuit with temperature compensation was designed and tested, the resulting temperature coefficient is 6\%FS/100°C. The integrated flow sensor was packaged and tested, and the resolution is less than 0.1L/min with range of 0.1-5L/min.",
keywords = "Flow sensor, Intermediate CMOS MEMS, Monolithic integration, Piezoresistor",
author = "Dan Li and T. Zhao and L. Qian and Yang, \{Z. C.\} and Dacheng Zhang",
year = "2009",
doi = "10.1109/SENSOR.2009.5285515",
language = "英语",
isbn = "9781424441938",
series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "260--263",
booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",
}