@inproceedings{d91deb2537a74779b8c4a619d056630f,
title = "A microscopic multi-view based workcell for wafer-level microassembling",
abstract = "This paper reports on a workcell developed for microfluidic chip alignment and microassembly operations in volume MEMS devices production. The workcell consists of a 6-DOF (Degree of Freedom) high precision positioning unit, a split-field imaging unit, an auxiliary unit, and a control software unit. A multi-view microscopic vision unit is employed to achieve evelling compensation and observe two pairs of alignment keys. Zooming, focusing and illuminating of the optics can be adjusted automatically through image analysis to bring the alignment keys into view with high-level image quality. Face-to-face alignment movements are driven by the 6-DOF precision positioning unit. Experimental results show that the microassembly accuracy of the workcell can reach 2.1μm.",
keywords = "Alignment, Microassembly, Microfluidic chip",
author = "Minglei Sun and Jingjun Yu and Guanghua Zong and Shusheng Bi and Rong Liu",
year = "2006",
doi = "10.1109/ROBIO.2006.340180",
language = "英语",
isbn = "1424405718",
series = "2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006",
pages = "1582--1587",
booktitle = "2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006",
note = "2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006 ; Conference date: 17-12-2006 Through 20-12-2006",
}