A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps

Chao Qi; Keita Nagai; Ming Ji; Yu Miyahara; Naohiro Sugita; Tadahiko Shinshi; Masaki Nakano; Chiaki Sato

doi:10.1109/PowerMEMS56853.2022.10007558

A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps

Chao Qi^*
, Keita Nagai
, Ming Ji
, Yu Miyahara
, Naohiro Sugita
, Tadahiko Shinshi^*
, Masaki Nakano
, Chiaki Sato

^*此作品的通讯作者

Institute of Science Tokyo
Nagasaki University

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

2 引用（Scopus）

摘要

This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young's modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.

源语言	英语
主期刊名	2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022
出版商	Institute of Electrical and Electronics Engineers Inc.
页	309-310
页数	2
ISBN（电子版）	9781665493062
DOI	https://doi.org/10.1109/PowerMEMS56853.2022.10007558
出版状态	已出版 - 2022
已对外发布	是
活动	21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 - Salt Lake City, 美国期限: 12 12月 2022 → 15 12月 2022

出版系列

姓名	2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022

会议

会议	21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022
国家/地区	美国
市	Salt Lake City
时期	12/12/22 → 15/12/22

联合国可持续发展目标

此成果有助于实现下列可持续发展目标：

可持续发展目标 7 经济适用的清洁能源

访问文件

10.1109/PowerMEMS56853.2022.10007558

其它文件与链接

链接到 Scopus 的出版物

引用此

Qi, C., Nagai, K., Ji, M., Miyahara, Y., Sugita, N., Shinshi, T., Nakano, M., & Sato, C. (2022). A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. 在 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 (页码 309-310). (2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PowerMEMS56853.2022.10007558

Qi, Chao ; Nagai, Keita ; Ji, Ming 等. / A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. 页码 309-310 (2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022).

@inproceedings{c84d0b7ded3b4a9d8c8b4e25eeef5993,

title = "A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps",

abstract = "This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young's modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.",

keywords = "FePt Thick Film, Magnetic Actuator, Magnetic MEMS, Micropump",

author = "Chao Qi and Keita Nagai and Ming Ji and Yu Miyahara and Naohiro Sugita and Tadahiko Shinshi and Masaki Nakano and Chiaki Sato",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 ; Conference date: 12-12-2022 Through 15-12-2022",

year = "2022",

doi = "10.1109/PowerMEMS56853.2022.10007558",

language = "英语",

series = "2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "309--310",

booktitle = "2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022",

address = "美国",

}

Qi, C, Nagai, K, Ji, M, Miyahara, Y, Sugita, N, Shinshi, T, Nakano, M & Sato, C 2022, A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. 在 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022. 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022, Institute of Electrical and Electronics Engineers Inc., 页码 309-310, 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022, Salt Lake City, 美国, 12/12/22. https://doi.org/10.1109/PowerMEMS56853.2022.10007558

A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. / Qi, Chao; Nagai, Keita; Ji, Ming 等.
2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. 页码 309-310 (2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps

AU - Qi, Chao

AU - Nagai, Keita

AU - Ji, Ming

AU - Miyahara, Yu

AU - Sugita, Naohiro

AU - Shinshi, Tadahiko

AU - Nakano, Masaki

AU - Sato, Chiaki

PY - 2022

Y1 - 2022

N2 - This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young's modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.

AB - This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young's modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.

KW - FePt Thick Film

KW - Magnetic Actuator

KW - Magnetic MEMS

KW - Micropump

UR - https://www.scopus.com/pages/publications/85147034395

U2 - 10.1109/PowerMEMS56853.2022.10007558

DO - 10.1109/PowerMEMS56853.2022.10007558

M3 - 会议稿件

AN - SCOPUS:85147034395

T3 - 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022

SP - 309

EP - 310

BT - 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022

Y2 - 12 December 2022 through 15 December 2022

ER -

Qi C, Nagai K, Ji M, Miyahara Y, Sugita N, Shinshi T 等. A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. 在 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. 页码 309-310. (2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022). doi: 10.1109/PowerMEMS56853.2022.10007558

A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps

摘要

出版系列

会议

联合国可持续发展目标

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引用此