磁悬浮分子泵高速转子章动相位裕度跟踪补偿控制

Aiming at the problem of instability caused by nutation mode in the high speed operation of magnetic suspension rotor, a nutation phase margin tracking compensation control method based on cross feedback is proposed. By using the complex coefficient modeling method, the damping nutation frequency of the flat rotor under closed loop control is quantitatively analyzed. The analytic relationship between nutation frequency, control system parameters and rotational speed is also established. The adaptive tracking filter is used to track and extract nutation frequency signals, which is applied to the nutation control channel of cross feedback. In the whole speed range, the tracking compensation control of nutation phase margin is realized. The simulation results show that the nutation frequency calculation is accurate, and the nutation control method based on cross feedback can effectively solve the nutation mode stability control problem in the full speed range of the high-speed magnetically suspended rotor. Finally, the proposed method is applied to the high speed rotor control system of the large-scale turbo molecular pump. Experimental results show that the nutation magnitude is suppressed below -60 dB. The proposed method eliminates the impact of the nutation mode on the stability of the control system and ensures the long-term stable operation of the turbo molecular pump.