硅基微型静电谐振式直流电场传感器建模与仿真分析

MEMS electric field sensors have wide application prospects in power systems because of their small size, low power consumption, low cost, and ease of mass production. In this paper, the electrostatic electrode coplanar horizontal resonance MEMS DC electric field sensor was taken as the research object. For its driving unit, motion process and induction unit, the sensor dynamic model based on electrostatic force drive and the electrical model of sensitive structure based on electrostatic induction were established respectively. The multi-physics model integration of the miniature electric field sensor was realized. The established model can quantitatively characterize the output characteristics of the sensor and the influence of related structural dimensions on the performance of the sensor. Through simulation calculations, it is found that properly reducing the tooth width and tooth spacing and increasing the induction tooth length can increase the output current of this type of sensor, thereby improving its measurement sensitivity. Research can provide good support for the design and performance optimization of miniature electric field sensors.