干涉式集成光学陀螺关键技术及应用前景分析

The integrated interferometric optical gyroscope (IOG) is a chip-based inertial sensor device based on optoelectronic integration technology. While achieving high performance, it can also realize mass production and meet low SWaP+C (Size Weight and Power, plus Cost, volume, weight, power consumption and cost) requirement, which holds great application potential in the unmanned field. According to the development course and trend of IOG, the key components such as low loss waveguide ring, single polarization waveguide resonator and heterogeneous waveguide integrated coupling structure based on silicon nitride are designed, and the prototype of interferometric IOG based on passive integrated chip and fiber ring is built. A bias stability of 0.03 °/h is achieved, to the best of our acknowledge, which is the best domestic result for the gyros of the same type. Finally, the application prospect analysis of interferometric IOG is presented.