基于小波变换的多频静电力显微镜动态过程测量方法

Electrostatic force microscopy (EFM) has high sensitivity and lateral resolution, and it is widely used to measure the electrostatic properties of new energy materials. The time-resolved electrostatic force microscope technology is used to measure the dynamic electrical properties of materials, pump detection method commonly used in this technology has problems such as complex equipment, high cost, and uncertainty in the measurement. In this work the method of directly measuring the time domain is adopted. This method reduces the complexity of measurement. By using the multi-frequency or high-frequency excitation method, the simultaneous measurement of multiple EFM parameters and the improvement of time resolution can be achieved, reaching a time resolution of microseconds, and by applying wavelet transform to the tip signal obtained by the measurement the dynamic electrical properties of the materials can be extracted. Applying this technology to simulation experiments, it is possible to measure the dynamic potential changes and the characteristic time parameter of ion movement in the microsecond-level electrical dynamic process of the simulated battery materials.