双层亚波长光栅微位移传感系统结构优化设计与性能仿真

Yujiao Zhao; Zhen Zhou

doi:10.16818/j.issn1001-5868.2019.05.005

双层亚波长光栅微位移传感系统结构优化设计与性能仿真

Yujiao Zhao
, Zhen Zhou^*

^*此作品的通讯作者

仪器科学与光电工程学院

Beihang University

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

In this paper, the relationship between the transmittance of zero-order diffracted light and the in-plane and out-of-plane displacement of the dual subwavelength gratings was analyzed, and the influence of key structural parameters on the sensitivity of the displacement detection was simulated with Rsoft software. The structure of the sensing system was optimized and simulations were performed to make comparisons on its performance. The high sensitivity of sub-wavelength grating displacement detection was verified in theory.

投稿的翻译标题	Structural Optimization and Performance Simulation of Dual Subwavelength Grating Micro-Displacement Sensing System
源语言	繁体中文
页（从-至）	626-630
页数	5
期刊	Bandaoti Guangdian/Semiconductor Optoelectronics
卷	40
期	5
DOI	https://doi.org/10.16818/j.issn1001-5868.2019.05.005
出版状态	已出版 - 1 10月 2019

关键词

Evanescent wave
Micro-displacement detection
Rigorous coupled-wave theory
Simulation
Sub-wavelength grating

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10.16818/j.issn1001-5868.2019.05.005

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N2 - In this paper, the relationship between the transmittance of zero-order diffracted light and the in-plane and out-of-plane displacement of the dual subwavelength gratings was analyzed, and the influence of key structural parameters on the sensitivity of the displacement detection was simulated with Rsoft software. The structure of the sensing system was optimized and simulations were performed to make comparisons on its performance. The high sensitivity of sub-wavelength grating displacement detection was verified in theory.

AB - In this paper, the relationship between the transmittance of zero-order diffracted light and the in-plane and out-of-plane displacement of the dual subwavelength gratings was analyzed, and the influence of key structural parameters on the sensitivity of the displacement detection was simulated with Rsoft software. The structure of the sensing system was optimized and simulations were performed to make comparisons on its performance. The high sensitivity of sub-wavelength grating displacement detection was verified in theory.

KW - Evanescent wave

KW - Micro-displacement detection

KW - Rigorous coupled-wave theory

KW - Simulation

KW - Sub-wavelength grating

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M3 - 文章

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JO - Bandaoti Guangdian/Semiconductor Optoelectronics

JF - Bandaoti Guangdian/Semiconductor Optoelectronics

IS - 5

ER -

双层亚波长光栅微位移传感系统结构优化设计与性能仿真

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