光压加速度计光斑位置检测技术研究

As a new type of optical inertial sensor, LFA system consists of three modules of microsphere suspension and capture, position detection and output of optical closed-loop and acceleration. The accuracy of the position detection effects a lot in the whole LFA system. In this paper, the working principles of LFA and spot acquisition method were introduced, based on which, a small angle refraction spot acquisition method was proposed to effectively reduce the detection error caused by the malformation of microarray surface. For the detection of spot positions, using QD as the detection element and based on the classical geometric approximation method, a new cooperative fitting algorithm was proposed by introducing Boltzmann function model. Experimental results show that, compared with the single geometric approximation method, the new cooperative covariance algorithm reduces the detection error by about 56%.