XPS group array analysis of a combinatorial Ni-Ti-Co thin film library

The last few decades have seen rapid development in computational and theoretical tools for simulating, fabricating, and characterizing material systems. In this report, the potential of surface characterization by x-ray photoelectron spectroscopy (XPS) to provide rapid elemental and chemical state information is presented. The development of the group analysis array functionality is significant for facilitating processing and display of large datasets in the application of XPS analysis to combinatorial materials discovery. We demonstrate that group array analysis provides a more detailed understanding of the chemical distribution across a Ni-Ti-Co combinatorial thin-film materials library.