VOC gas sensing based on the BJT mode of gated LBJT device

  • Heng Yuan*
  • , Bo Wang
  • , Se Hyuk Yeom
  • , Kyu Jin Kim
  • , Dae Hyuk Kwon
  • , Shin Won Kang
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Volatile organic compounds (VOCs) gas sensor based on gated lateral bipolar junction transistor (LBJT) was developed in this study. The device was fabricated using 0.35-μm logic process by Magnachip-Hynix Co. Ltd. under the Integrated Circuit Design education Center Multi Project Wafer (IDEC-MPW) program. Solvatochromic dye as the sensing membrane was coated on the floating gate of the device. A semiconductor test and analyzer (STA-EL421, ELECS) was used to measure the sensing results. Following the results, we found that the sensing device which used the gated LBJT device has fast responsibility and reversibility to VOC gases (acetone etc.).

Original languageEnglish
Title of host publicationKey Engineering Materials and Computer Science
Pages597-600
Number of pages4
DOIs
StatePublished - 2011
Externally publishedYes
Event2011 International Conference on Key Engineering Materials and Computer Science, KEMCS 2011 - Dalian, China
Duration: 6 Aug 20117 Aug 2011

Publication series

NameAdvanced Materials Research
Volume320
ISSN (Print)1022-6680

Conference

Conference2011 International Conference on Key Engineering Materials and Computer Science, KEMCS 2011
Country/TerritoryChina
CityDalian
Period6/08/117/08/11

Keywords

  • Gated lateral bipolar junction transistor
  • Solvatochromic dye
  • Volatile organic compounds (VOCs)

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