Uniform CoPt permanent magnetic film with high in-plane coercivity

Zhi Li; Kun Zhang; Weibin Chen; Zitong Zhou; Zhiqiang Cao; Shaohua Yan; Weisheng Zhao; Qunwen Leng

doi:10.1109/EDTM50988.2021.9420813

Uniform CoPt permanent magnetic film with high in-plane coercivity

Zhi Li
, Kun Zhang
, Weibin Chen
, Zitong Zhou
, Zhiqiang Cao
, Shaohua Yan
, Weisheng Zhao
, Qunwen Leng

School of Integrated Circuit Science and Engineering

Beihang University
Shandong University
Goertek Inc.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Permanent magnetic CoPt films with different Pt component are fabricated by magnetron sputtering on W buffer layer at ambient temperature. The magnetic, composition, structural and surface properties of the films are systematically characterized. Ultra-low surface roughness Ra=0.311 nm and high in-plane coercivity Hc=2410 Oe are realized, which may exhibit promising application potential in the area of magnetic sensors.

Original language	English
Title of host publication	2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728181769
DOIs	https://doi.org/10.1109/EDTM50988.2021.9420813
State	Published - 8 Apr 2021
Event	5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021 - Chengdu, China Duration: 8 Apr 2021 → 11 Apr 2021

Publication series

Name	2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021

Conference

Conference	5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021
Country/Territory	China
City	Chengdu
Period	8/04/21 → 11/04/21

Keywords

CoPt film and Manufacturing
Permanent magnetic film

Access to Document

10.1109/EDTM50988.2021.9420813

Cite this

Li, Z., Zhang, K., Chen, W., Zhou, Z., Cao, Z., Yan, S., Zhao, W., & Leng, Q. (2021). Uniform CoPt permanent magnetic film with high in-plane coercivity. In 2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021 Article 9420813 (2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDTM50988.2021.9420813

@inproceedings{aefc9e614547448faae9533a8b7c25ec,

title = "Uniform CoPt permanent magnetic film with high in-plane coercivity",

abstract = "Permanent magnetic CoPt films with different Pt component are fabricated by magnetron sputtering on W buffer layer at ambient temperature. The magnetic, composition, structural and surface properties of the films are systematically characterized. Ultra-low surface roughness Ra=0.311 nm and high in-plane coercivity Hc=2410 Oe are realized, which may exhibit promising application potential in the area of magnetic sensors.",

keywords = "CoPt film and Manufacturing, Permanent magnetic film",

author = "Zhi Li and Kun Zhang and Weibin Chen and Zitong Zhou and Zhiqiang Cao and Shaohua Yan and Weisheng Zhao and Qunwen Leng",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021 ; Conference date: 08-04-2021 Through 11-04-2021",

year = "2021",

month = apr,

day = "8",

doi = "10.1109/EDTM50988.2021.9420813",

language = "英语",

series = "2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021",

address = "美国",

}

Li, Z, Zhang, K, Chen, W, Zhou, Z, Cao, Z, Yan, S, Zhao, W & Leng, Q 2021, Uniform CoPt permanent magnetic film with high in-plane coercivity. in 2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021., 9420813, 2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021, Institute of Electrical and Electronics Engineers Inc., 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021, Chengdu, China, 8/04/21. https://doi.org/10.1109/EDTM50988.2021.9420813

Uniform CoPt permanent magnetic film with high in-plane coercivity. / Li, Zhi; Zhang, Kun; Chen, Weibin et al.
2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021. Institute of Electrical and Electronics Engineers Inc., 2021. 9420813 (2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Uniform CoPt permanent magnetic film with high in-plane coercivity

AU - Li, Zhi

AU - Zhang, Kun

AU - Chen, Weibin

AU - Zhou, Zitong

AU - Cao, Zhiqiang

AU - Yan, Shaohua

AU - Zhao, Weisheng

AU - Leng, Qunwen

PY - 2021/4/8

Y1 - 2021/4/8

N2 - Permanent magnetic CoPt films with different Pt component are fabricated by magnetron sputtering on W buffer layer at ambient temperature. The magnetic, composition, structural and surface properties of the films are systematically characterized. Ultra-low surface roughness Ra=0.311 nm and high in-plane coercivity Hc=2410 Oe are realized, which may exhibit promising application potential in the area of magnetic sensors.

AB - Permanent magnetic CoPt films with different Pt component are fabricated by magnetron sputtering on W buffer layer at ambient temperature. The magnetic, composition, structural and surface properties of the films are systematically characterized. Ultra-low surface roughness Ra=0.311 nm and high in-plane coercivity Hc=2410 Oe are realized, which may exhibit promising application potential in the area of magnetic sensors.

KW - CoPt film and Manufacturing

KW - Permanent magnetic film

UR - https://www.scopus.com/pages/publications/85106465562

U2 - 10.1109/EDTM50988.2021.9420813

DO - 10.1109/EDTM50988.2021.9420813

M3 - 会议稿件

AN - SCOPUS:85106465562

T3 - 2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021

BT - 2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021

Y2 - 8 April 2021 through 11 April 2021

ER -

Li Z, Zhang K, Chen W, Zhou Z, Cao Z, Yan S et al. Uniform CoPt permanent magnetic film with high in-plane coercivity. In 2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021. Institute of Electrical and Electronics Engineers Inc. 2021. 9420813. (2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021). doi: 10.1109/EDTM50988.2021.9420813

Uniform CoPt permanent magnetic film with high in-plane coercivity

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