Abstract
Ultra-precision diamond machining (UPDM) is a key technology in the manufacture of high-quality parts with a surface roughness of a few nanometers and form accuracy in the sub-micrometer range. These high-quality parts have been widely applied in aerospace, optics, energy, electronics, mechanics, etc. The UPDM process generally uses a single-crystal diamond cutting tool, which possesses nanometric edge sharpness, form reproducibility, and wear resistance. This article elucidates three main types of UPDM: single-point diamond turning, ultra-precision fly cutting, and fast/slow tool servo diamond machining. Considering the significance of the machining accuracy for UPDM, the influencing factors, on-machine measurement methods, and error compensation methods are illustrated. The practical applications of UPDM are also exemplified and discussed.
| Original language | English |
|---|---|
| Title of host publication | Encyclopedia of Materials |
| Subtitle of host publication | Metals and Alloys |
| Publisher | Elsevier |
| Pages | 462-477 |
| Number of pages | 16 |
| ISBN (Electronic) | 9780128197264 |
| ISBN (Print) | 9780128197332 |
| DOIs | |
| State | Published - 1 Sep 2021 |
| Externally published | Yes |
Keywords
- Fast-/slow tool servo diamond machining
- Freeform lenses
- LED
- Machining accuracy
- Microlens array
- Optical parts
- Single-point diamond turning
- Ultra-precision diamond machining
- Ultra-precision fly cutting
- V-groove structures
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