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Two-dimensional optical scanning of a piezoelectric cantilever actuator

  • Xiangcheng Chu*
  • , Long Ma
  • , Songmei Yuan
  • , Mengkai Li
  • , Longtu Li
  • *Corresponding author for this work
  • Tsinghua University

Research output: Contribution to journalArticlepeer-review

Abstract

A piezoelectric optical scanning cantilever structure with two-dimensional scanning angles was reported. The theoretical and experimental studies on the structure were carried out. By using finite element method, the effect of the materials and the structure size on the theoretical results were concluded, and a favorable two-dimensional piezoelectric optical scanning structure with a single cantilever was obtained. A two-dimensional piezoelectric optical scanning specimen was fabricated. It was found that a 0.282° bending scanning angle at 1056 Hz and a 0.12° torsional scanning angle at 4612 Hz were obtained under the forcing voltage of 5 V (o-p).

Original languageEnglish
Pages (from-to)774-777
Number of pages4
JournalJournal of Electroceramics
Volume21
Issue number1-4 SPEC. ISS.
DOIs
StatePublished - Dec 2008

Keywords

  • Flatness of the reflecting mirror
  • Forcing voltage
  • Scanning angle
  • Scanning frequency
  • Structural optimization
  • Two-dimensional optical scanning structure

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