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Tunable Sensing Performance of Linear Perpendicular TMR Sensor

  • Shaohua Yan
  • , Zitong Zhou
  • , Zhiqiang Cao
  • , Yaodi Yang
  • , Zhi Li
  • , Weibin Chen
  • , Qunwen Leng
  • , Weisheng Zhao
  • Beihang University
  • Shandong University
  • Goertek Inc.

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Magnetic tunnel junctions (MTJ) are engineered with the film stack of crossed magnetization pattern structure for perpendicular tunnel magneto-resistance (TMR) sensor application. The fabricated devices show good linearity and stability. The temperature dependence and the noise level of the sensor are also characterized. We demonstrate that the sensitivity and linear range of the perpendicular pinned TMR sensors can be tuned in quite a large range by controlling the free layer thickness. This research provides guidance for the design and process optimization of the perpendicular sensors.

Original languageEnglish
Title of host publication2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728181769
DOIs
StatePublished - 8 Apr 2021
Event5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021 - Chengdu, China
Duration: 8 Apr 202111 Apr 2021

Publication series

Name2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021

Conference

Conference5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021
Country/TerritoryChina
CityChengdu
Period8/04/2111/04/21

Keywords

  • free layer thickness and performance
  • perpendicular TMR sensor

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