Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System

Yan Zheng; Zhicheng Zhou; Hai Huang

doi:10.1109/ISRIMT53730.2021.9597166

Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System

Yan Zheng^*
, Zhicheng Zhou
, Hai Huang

^*Corresponding author for this work

School of Astronautics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Due to the inherent transverse sensitivity of the piezoelectric accelerometer, it can cause transverse errors far beyond the resolution of the sensor in the measurement of a 6D micro-vibration excitation system(6D-MVES). The experiments are conducted to verify the effects of transverse errors on the measurement of 6D micro-vibration and vibration control. Moreover, the transverse sensitivity of the accelerometer and the positive direction of the transverse sensitivity axis are experimentally measured at the same time. Finally, the transverse sensitivity correction method using the transverse sensitivity correction matrix in 6D-MVES is proposed, and the improvement on the accuracy of micro-vibration measurement and control is verified by experiments.

Original language	English
Title of host publication	2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	362-367
Number of pages	6
ISBN (Electronic)	9781665437189
DOIs	https://doi.org/10.1109/ISRIMT53730.2021.9597166
State	Published - 2021
Event	3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021 - Changzhou, China Duration: 24 Sep 2021 → 26 Sep 2021

Publication series

Name	2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021

Conference

Conference	3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021
Country/Territory	China
City	Changzhou
Period	24/09/21 → 26/09/21

Keywords

6D micro-vibration excitation system
ICP piezoelectric accelerometer
linear correction method of transverse error
transverse error
transverse sensitivity axis

Access to Document

10.1109/ISRIMT53730.2021.9597166

Cite this

Zheng, Y., Zhou, Z., & Huang, H. (2021). Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System. In 2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021 (pp. 362-367). (2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISRIMT53730.2021.9597166

Zheng, Yan ; Zhou, Zhicheng ; Huang, Hai. / Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System. 2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 362-367 (2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021).

@inproceedings{a94aeead201643caadf30e0dcdb04b8e,

title = "Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System",

abstract = "Due to the inherent transverse sensitivity of the piezoelectric accelerometer, it can cause transverse errors far beyond the resolution of the sensor in the measurement of a 6D micro-vibration excitation system(6D-MVES). The experiments are conducted to verify the effects of transverse errors on the measurement of 6D micro-vibration and vibration control. Moreover, the transverse sensitivity of the accelerometer and the positive direction of the transverse sensitivity axis are experimentally measured at the same time. Finally, the transverse sensitivity correction method using the transverse sensitivity correction matrix in 6D-MVES is proposed, and the improvement on the accuracy of micro-vibration measurement and control is verified by experiments.",

keywords = "6D micro-vibration excitation system, ICP piezoelectric accelerometer, linear correction method of transverse error, transverse error, transverse sensitivity axis",

author = "Yan Zheng and Zhicheng Zhou and Hai Huang",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021 ; Conference date: 24-09-2021 Through 26-09-2021",

year = "2021",

doi = "10.1109/ISRIMT53730.2021.9597166",

language = "英语",

series = "2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "362--367",

booktitle = "2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021",

address = "美国",

}

Zheng, Y, Zhou, Z & Huang, H 2021, Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System. in 2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021. 2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021, Institute of Electrical and Electronics Engineers Inc., pp. 362-367, 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021, Changzhou, China, 24/09/21. https://doi.org/10.1109/ISRIMT53730.2021.9597166

Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System. / Zheng, Yan; Zhou, Zhicheng; Huang, Hai.
2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 362-367 (2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System

AU - Zheng, Yan

AU - Zhou, Zhicheng

AU - Huang, Hai

PY - 2021

Y1 - 2021

N2 - Due to the inherent transverse sensitivity of the piezoelectric accelerometer, it can cause transverse errors far beyond the resolution of the sensor in the measurement of a 6D micro-vibration excitation system(6D-MVES). The experiments are conducted to verify the effects of transverse errors on the measurement of 6D micro-vibration and vibration control. Moreover, the transverse sensitivity of the accelerometer and the positive direction of the transverse sensitivity axis are experimentally measured at the same time. Finally, the transverse sensitivity correction method using the transverse sensitivity correction matrix in 6D-MVES is proposed, and the improvement on the accuracy of micro-vibration measurement and control is verified by experiments.

AB - Due to the inherent transverse sensitivity of the piezoelectric accelerometer, it can cause transverse errors far beyond the resolution of the sensor in the measurement of a 6D micro-vibration excitation system(6D-MVES). The experiments are conducted to verify the effects of transverse errors on the measurement of 6D micro-vibration and vibration control. Moreover, the transverse sensitivity of the accelerometer and the positive direction of the transverse sensitivity axis are experimentally measured at the same time. Finally, the transverse sensitivity correction method using the transverse sensitivity correction matrix in 6D-MVES is proposed, and the improvement on the accuracy of micro-vibration measurement and control is verified by experiments.

KW - 6D micro-vibration excitation system

KW - ICP piezoelectric accelerometer

KW - linear correction method of transverse error

KW - transverse error

KW - transverse sensitivity axis

UR - https://www.scopus.com/pages/publications/85123440687

U2 - 10.1109/ISRIMT53730.2021.9597166

DO - 10.1109/ISRIMT53730.2021.9597166

M3 - 会议稿件

AN - SCOPUS:85123440687

T3 - 2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021

SP - 362

EP - 367

BT - 2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021

Y2 - 24 September 2021 through 26 September 2021

ER -

Zheng Y, Zhou Z, Huang H. Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System. In 2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 362-367. (2021 3rd International Symposium on Robotics and Intelligent Manufacturing Technology, ISRIMT 2021). doi: 10.1109/ISRIMT53730.2021.9597166

Transverse Error of ICP Piezoelectric Accelerometers and Its Correction Method in 6D Micro-vibration Excitation System

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