Three-dimensional light intensity distribution reconstruction of argon ion in Helicon plasma source

This study presents a CT method integrated with image inpainting to reconstruct the three-dimensional distribution of argon ion light intensity in Helicon and Inductively Coupled Plasma (ICP) modes. The reconstructed intensity distribution was validated by comparing it with theoretical radiation intensity derived from probe measurements and argon CR model. Results demonstrate that the method accurately reconstructs the three-dimensional distribution of argon ion light intensity and reveals the spatial distribution patterns of ion intensity under Helicon and ICP modes. The Helicon mode has a concentration of intensity in the central region (Radial cross-section dispersion>84%) and while the ICP mode exhibiting a more dispersed distribution (<55%). The presence of a magnetic field showed a strong correlation with the intensity dispersion on the cross-section. This study provides an effective measurement method and data reference for understanding discharge mode characteristics and plasma behavior in Helicon plasma sources.