@inproceedings{13a68e853e80408d9283fc8f96296985,
title = "The theoretical model and simulation of resonant sensors",
abstract = "The resonator simulator provides a new method for researching the resonant sensor closed-loop circuit. In this paper, the mathematic model of silicon pressure resonator is established to design the circuit with resonator characteristic. Firstly the relation between pressure and the amplitude-frequency characteristic of the resonant beam is deduced. Secondly, combined with the in-out of excitation and pick-up, a complete mathematic model of resonator characteristic is given. Then typical experimental data fitting is made to provide particular parameters for the simulator. Finally a method for the circuit of design is provided.",
keywords = "Curve fitting, Pressure sensor, Resonant, Theoretical model",
author = "Weiwei Xing and Yan Du and Shangchun Fan",
year = "2011",
doi = "10.1109/ICMTMA.2011.817",
language = "英语",
isbn = "9780769542966",
series = "Proceedings - 3rd International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2011",
pages = "982--985",
booktitle = "Proceedings - 3rd International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2011",
note = "3rd International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2011 ; Conference date: 06-01-2011 Through 07-01-2011",
}