@inproceedings{962c779636624495a148d3e10f9ea617,
title = "The technique for fabricating submicron moir{\'e} grating using FIB milling",
abstract = "In this study, focused gallium ion (Ga+) beam is utilised to fabricate micro/submicron spacing gratings on specimen surface. The grating types include: parallel, cross, and hybrid (grating with double-frequency). Several hybrid gratings with double frequency were produced in combination mode or superposition mode, which have a good potential to measure deformation within different range. Techniques for producing different type of gratings are discussed in detail. As an application, a 5000 lines/mm grating was fabricated on an amorphous SIC MEMS cantilever and was successfully used to measure its virtual strain with aid of digital moir{\'e}. The experimental results verify the feasibility of fabricating high frequency grating on metal or non-metal surface using the FIB milling and the resultant grating can be used to measure micro-deformation.",
keywords = "Digital moir{\'e}, FIB, Grating",
author = "Huimin Xie and Yanjie Li and Hua Du and Bing Pan and Qiang Luo and Changzhi Gu and Haichang Jiang",
year = "2008",
doi = "10.4028/www.scientific.net/amr.47-50.710",
language = "英语",
isbn = "0878493786",
series = "Advanced Materials Research",
publisher = "Trans Tech Publications",
pages = "710--713",
booktitle = "Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures",
address = "德国",
note = "Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures ; Conference date: 28-07-2008 Through 31-07-2008",
}